Surface sensitive detection systems

Gas flow detectors for surface characterization

Surface sensitive detectors

• Gas flow detector with multi-wire anode
• All gas connections are made with Swagelok 3mm
• Surface analyzes (thin surface layers)
• Emission spectra registration
• Possible to combine with transmission system for simultaneous analyzes (if the sample is suitable for transmission analyzes)
• Suitable for thick samples (up to 1cm thickness)
• Requires the connection to special gas mixture (see bellow)

Conversion electrons

• Required gas mixture of 10% of CH₄ in He, cylinder output pressure controllable in a range from 0 to 3 bar
• Depth senitivity is about 100 nm (depends on sample)
• Sample has to be conductive and connected to the sample holder in a conductive way
• Best sensitivity

X-rays

• Required gas mixture of 10% of CH₄ in Ar, cylinder output pressure controllable in a range from 0 to 3 bar
• Depth senitivity is about 10 um (depends on sample)

Complete system illustration

• The system is connected to the cylinder via gas tubing made with 3 mm swagelok connections
• Gas tubing includes flow rate control valve and bubble indicator